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A new type of surface acoustic wave temperature sensor designed by the Institute of Acoustics
[ Instrument network instrument research and development ] The heat radiation loss caused by high temperature environment will cause the sensor device to have a large acoustic attenuation, so the sensor working in this environment should have a sufficiently large quality factor (Q) and low loss. Traditional wired active sensors cannot be used for temperature measurement in high-temperature environments, and wireless passive temperature sensors based on surface acoustic wave (SAW) provide a good solution for this.
Doctoral student Li Xueling of the Institute of Acoustics of the Chinese Academy of Sciences and his supervisor Wang Wen, etc., used the short pulse method to extract the accurate reflection coefficient, and used the typical coupling of modes (COM) model to compare the LGS/Pt structure surface acoustic wave The temperature sensor device is optimized and designed, and simulation and experiment prove that the device has good high temperature sensing performance. Related research results are published online on Sensors.
Researchers carried out experimental research based on the structure of LGS/Pt devices with different Pt film thickness and wavelength ratio. Researchers use the least square method to fit the experimental data, obtain the reflection coefficient calculation formula, use the finite element method to extract other COM parameters of Pt/LGS, and simulate the single-port resonator of the Pt/LGS structure through a typical COM model , And determined the design parameters with a larger Q value.
The researchers developed a 400MHz single-port surface acoustic wave resonator using photolithography technology, and measured it with a network analyzer to obtain a higher Q value. The measurement results are in good agreement with the simulation results. In the temperature range of 50～650℃, the high temperature characteristics of the prepared sensor device were tested. The test results show that it has good stability and linear TCF (～25 ppm/°C.), which proves that the device has a good high temperature Sensing performance.
Studies have shown that surface acoustic wave high temperature sensing technology can be used for high-sensitivity temperature monitoring and early warning in extreme high temperature environments.
The research work was funded by the National Natural Science Foundation of China Joint Key Fund Project.